Fire broke out in boarded up factory premises at Calne on Tuesday.
Three appliances from Chippenham, Calne and Corsham headed for the factory, once home of Cam Circuits, after a passer-by raised the alarm.
The fire started in the plant room at the closed up factory, close to the former railway line now the North Wiltshire Rivers Route.
Station Officer Adrian Hurren, the station commander at Chippenham, said he suspected the fire was deliberately started and police officers are investigating.
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